Generation of accelerated cluster-ion beams for nanotechnology
نویسندگان
چکیده
Formation of keV-energy Ar cluster ion beam is studied. Optimum condition for formation high intensity cluster beam with 2*10 16 clusters/sm 2 *sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.
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